Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818563 | Process and apparatus for removal of photoresist from semiconductor wafers using spray nozzles | Richard Novak, Gim-Syang Chen, Dennis Nemeth | 2004-11-16 |
| 6766818 | Chemical concentration control device | Richard Novak, Timothy J. Helmer | 2004-07-27 |
| 6767877 | Method and system for chemical injection in silicon wafer processing | CHANG-WEI KUO, Nick Yialamas, Gregory Skibinski | 2004-07-27 |