Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776696 | Continuous chemical mechanical polishing process for polishing multiple conductive and non-conductive layers on semiconductor wafers | Deepak Mahulikar | 2004-08-17 |
| 6749488 | Chemical mechanical polishing slurry composition for polishing conductive and non-conductive layers on semiconductor wafers | Anthony M. Pasqualoni, Deepak Mahulikar, Larry LaFollette | 2004-06-15 |