Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6790428 | Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride | Athanasios Tsirukis, John T. Lileck, Kenneth E. Fegley | 2004-09-14 |
| 6686594 | On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring | Bing Ji, Robert Gordon Ridgeway, Eugene Joseph Karwacki, Jr., Steven Rogers, Peter J. Maroulis +1 more | 2004-02-03 |