Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6746577 | Method and apparatus for thickness control and reproducibility of dielectric film deposition | Linus Albert Fetter | 2004-06-08 |
| 6674291 | Method and apparatus for determining and/or improving high power reliability in thin film resonator devices, and a thin film resonator device resultant therefrom | Peter Ledel Gammel, Juan Alejandro Herbsommer, Hugo Safar, Yiu-Huen Wong | 2004-01-06 |