Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6811669 | Methods and apparatus for improved current density and feature fill control in ECD reactors | David Gonzalez | 2004-11-02 |
| 6776688 | Real-time polishing pad stiffness-control using magnetically controllable fluid | Andrew Tae Kim, Christopher Lyle Borst | 2004-08-17 |