Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812055 | MEMS devices and methods of manufacture | Hirokazu Tamura, Akira Mugino, Alan L. Sidman | 2004-11-02 |
| 6717227 | MEMS devices and methods of manufacture | Hirokazu Tamura, Akira Mugino, Alan L. Sidman | 2004-04-06 |