Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828178 | Thin film semiconductor device having arrayed configuration of semiconductor crystals and a method for producing it | Yasuhisa Oana, Hiroyuki Abe, Yoshitaka Yamamoto, Hideo Koseki, Mitsunori Warabisako | 2004-12-07 |
| 6819401 | Exposure method and apparatus | Susumu Tsujikawa, Yukio Taniguchi, Hirotaka Yamaguchi | 2004-11-16 |
| 6816231 | Method and apparatus for exposure | Susumu Tsujikawa, Yukio Taniguchi, Hirotaka Yamaguchi | 2004-11-09 |