Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6811614 | CVD reactor with substrate holder which is rotatably driven and mounted by a gas stream | Johannes Käppeler, Frank Wischmeyer | 2004-11-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6811614 | CVD reactor with substrate holder which is rotatably driven and mounted by a gas stream | Johannes Käppeler, Frank Wischmeyer | 2004-11-02 |