Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664706 | Electrostatically-controllable diffraction grating | Erik Deutsch, Stephen D. Senturia | 2003-12-16 |
| 6552328 | Microsensor including a VCSEL and method for electro-mechanical coupling of microsensors | Andrew Berlin | 2003-04-22 |