Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6636626 | Wafer mapping apparatus and method | Kitaek Kang | 2003-10-21 |
| 6633132 | Plasma gereration apparatus and method | — | 2003-10-14 |
| 6621943 | System and method for converting analog data to digital data | Kitaek Kang, Taro Yamazaki | 2003-09-16 |
| 6602797 | Wafer processing method | Hiromitsu Kuribayashi | 2003-08-05 |
| 6591161 | Method for determining robot alignment | Kitaek Kang | 2003-07-08 |
| 6575739 | Configurable wafer furnace | — | 2003-06-10 |
| 6568899 | Wafer processing system including a robot | Hiromitsu Kuribayashi | 2003-05-27 |
| 6528435 | Plasma processing | — | 2003-03-04 |
| 6516244 | Wafer alignment system and method | Kitaek Kang | 2003-02-04 |