Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6503335 | Centrifuge and method for centrifuging a semiconductor wafer | Georg-Friedrich Hohl, Roland Brunner, Susanne Bauer-Mayer, Hans-Joachim Luthe, Franz Sollinger | 2003-01-07 |