Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6639192 | Deposition device for depositing semiconductor material on a heated substrate | Harald Hertlein, Karl Hesse | 2003-10-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6639192 | Deposition device for depositing semiconductor material on a heated substrate | Harald Hertlein, Karl Hesse | 2003-10-28 |