Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6521100 | Method of producing a piezoelectric thin film and bulk acoustic wave resonator fabricated according to the method | Jyrki Molarius | 2003-02-18 |
| 6515558 | Thin-film bulk acoustic resonator with enhanced power handling capacity | — | 2003-02-04 |