Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6671048 | Method for determining wafer misalignment using a pattern on a fine alignment target | — | 2003-12-30 |
| 6639676 | Method for determining rotational error portion of total misalignment error in a stepper | — | 2003-10-28 |
| 6544859 | Semiconductor processing methods and structures for determining alignment during semiconductor wafer processing | David Ziger, Edward Dension | 2003-04-08 |
| 6541283 | Method for determining magnification error portion of total misalignment error in a stepper | — | 2003-04-01 |