Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649253 | Method of using films having optimized optical properties for chemical mechanical polishing endpoint detection | Subhas Bothra | 2003-11-18 |
| 6572439 | Customized polishing pad for selective process performance during chemical mechanical polishing | Charles Franklin Drill | 2003-06-03 |
| 6569757 | Methods for forming co-axial interconnect lines in a CMOS process for high speed applications | Subhas Bothra, Calvin T. Gabriel, Michael N. Misheloff | 2003-05-27 |
| 6545338 | Methods for implementing co-axial interconnect lines in a CMOS process for high speed RF and microwave applications | Subhas Bothra, Calvin T. Gabriel, Michael N. Misheloff | 2003-04-08 |