Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6600162 | Method and device for exposing a substrate to light | Peter Hahmann, Dirk Beyer, Dorothee Krauhs | 2003-07-29 |
| 6541776 | Device for electrostatic deflection of a particle beam | Hans-Joachim Döring | 2003-04-01 |