Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6547876 | Apparatus for growing epitaxial layers on wafers by chemical vapor deposition | Ian Ferguson, Michael A. Spencer | 2003-04-15 |
| 6506252 | Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition | Vadim Boguslavskiy | 2003-01-14 |