Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6654402 | Corona preionization electrode unit for use in gas laser apparatus | Kazuaki Hotta, Motohiro Arai | 2003-11-25 |
| 6643312 | ArF excimer laser device and a fluoride laser device | Yoichi Sasaki | 2003-11-04 |
| 6639929 | Pulse oscillating gas laser device | Hakaru Mizoguchi, Takashi Saito, Naoki Kataoka | 2003-10-28 |
| 6636546 | ArF and KrF excimer laser apparatus and fluorine laser apparatus for lithography | Yoichi Sasaki | 2003-10-21 |
| 6584131 | ArF excimer laser device for exposure | — | 2003-06-24 |