Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6518164 | Etching process for forming the trench with high aspect ratio | Yueh-Feng Ho | 2003-02-11 |
| 6509228 | Etching procedure for floating gate formation of a flash memory device | Gow-Wei Sun | 2003-01-21 |