Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6569726 | Method of manufacturing MOS transistor with fluoride implantation on silicon nitride etching stop layer | Tong-Hsin Lee | 2003-05-27 |
| 6534354 | Method of manufacturing MOS transistor with fluorine implantation at a low energy | Tong-Hsin Lee | 2003-03-18 |