Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6511584 | Configuration for coating a substrate by means of a sputtering device | Joachim Szczyrbowski, Gotz Teschner, Anton Zmelty, Dietmar Marquardt | 2003-01-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6511584 | Configuration for coating a substrate by means of a sputtering device | Joachim Szczyrbowski, Gotz Teschner, Anton Zmelty, Dietmar Marquardt | 2003-01-28 |