Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6569577 | Phase-shift photo mask blank, phase-shift photo mask and method for fabricating semiconductor devices | Akihiko Isao, Susumu Kawada, Shuichiro Kanai, Nobuyuki Yoshioka | 2003-05-27 |