Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645838 | Selective absorption process for forming an activated doped region in a semiconductor | Yun Wang, Michael O. Thompson | 2003-11-11 |
| 6635541 | Method for annealing using partial absorber layer exposed to radiant energy and article made with partial absorber layer | Yun Wang, Carol M. Gelatos | 2003-10-21 |
| 6635588 | Method for laser thermal processing using thermally induced reflectivity switch | Andrew M. Hawryluk, Yun Wang, Michael O. Thompson | 2003-10-21 |
| 6570656 | Illumination fluence regulation system and method for use in thermal processing employed in the fabrication of reduced-dimension integrated circuits | James B. Owens, Jr., Andrew M. Hawryluk, Yun Wang | 2003-05-27 |