Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667242 | Brim and gas escape for non-contact wafer holder | Sergey Savastiouk, Alex Berger | 2003-12-23 |
| 6664129 | Integrated circuits and methods for their fabrication | — | 2003-12-16 |
| 6639303 | Integrated circuits and methods for their fabrication | — | 2003-10-28 |
| 6627039 | Plasma processing methods and apparatus | — | 2003-09-30 |
| 6541729 | Monitoring and controlling separate plasma jets to achieve desired properties in a combined stream | — | 2003-04-01 |