Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6544858 | Method for treating silicon-containing polymer layers with plasma or electromagnetic radiation | Knut Beekman | 2003-04-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6544858 | Method for treating silicon-containing polymer layers with plasma or electromagnetic radiation | Knut Beekman | 2003-04-08 |