Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6537924 | Method of chemically growing a thin film in a gas phase on a silicon semiconductor substrate | Tadashi Ohashi, Shinichi Mitani, Hideki Arai, Hidenori Takahashi | 2003-03-25 |