Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656026 | Wafer polishing apparatus | — | 2003-12-02 |
| 6648739 | Wafer polishing apparatus | Hirohiko Izumi, Satomi Michiya, Takashi Fujita, Mikhail Tuzov | 2003-11-18 |
| 6572438 | Structure of polishing head of polishing apparatus | — | 2003-06-03 |