Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6596550 | Method for monitoring substrate biasing during plasma processing of a substrate | Edward L. Sill, Craig T. Baldwin | 2003-07-22 |
| 6577113 | Apparatus and method for measuring substrate biasing during plasma processing of a substrate | Edward L. Sill, Craig T. Baldwin | 2003-06-10 |