Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660875 | Ion exchange purification of dielectric condensate precursor fluids and silicate esters such as tetraethylorthosilicate (TEOS) | — | 2003-12-09 |
| 6537916 | Removal of CMP residue from semiconductor substrate using supercritical carbon dioxide process | Marc de Leeuwe, Glenn A. Roberson, Jr. | 2003-03-25 |
| 6509141 | Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process | — | 2003-01-21 |