Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630364 | System for automatic control of the wall bombardment to control wall deposition | — | 2003-10-07 |
| 6573731 | Electron density measurement and control system using plasma-induced changes in the frequency of a microwave oscillator | Joseph T. Verdeyen, Murray D. Sirkis | 2003-06-03 |
| 6559601 | Plasma vacuum pump | Raphael A. Dandl, Gareth Guest | 2003-05-06 |
| 6535785 | System and method for monitoring and controlling gas plasma processes | Richard Parsons | 2003-03-18 |
| 6530342 | Large area plasma source | — | 2003-03-11 |
| 6511577 | Reduced impedance chamber | — | 2003-01-28 |