Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6629423 | Processor and temperature control method therefor | Masao Furuya | 2003-10-07 |
| 6579056 | Cart for mounting/demounting wafer transfer robot | Yoshiaki Sasaki, Shuji Hagihara | 2003-06-17 |