Shunichi Iimuro

TL Tokyo Electron Limited: 1 patents #101 of 380Top 30%

📍 Yamanashi, MA: #2 of 3 inventorsTop 70%

Overall (2003): #120,724 of 273,478Top 45%

Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
6589435	Plasma etching method	Shin Okamoto	2003-07-08