Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6537904 | Method for manufacturing a semiconductor device having a fluorine containing carbon inter-layer dielectric film | — | 2003-03-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6537904 | Method for manufacturing a semiconductor device having a fluorine containing carbon inter-layer dielectric film | — | 2003-03-25 |