SK

Shigeru Kawamura

TL Tokyo Electron Limited: 1 patents #101 of 380Top 30%
Overall (2003): #120,391 of 273,478Top 45%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6528108 Method and apparatus for observing porous amorphous film, and method and apparatus for forming the same 2003-03-04