SK

Shigeru Kasai

TL Tokyo Electron Limited: 2 patents #38 of 380Top 10%
📍 Yamanashi, JP: #27 of 226 inventorsTop 15%
Overall (2003): #43,461 of 273,478Top 20%
2
Patents 2003

Issued Patents 2003

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6627859 Method and apparatus for temperature control of heater Naoto Ikeda 2003-09-30
6530687 Temperature measuring system Tomohiro Suzuki, Masahiro Shimizu, Minoru Yazawa 2003-03-11