RF

Richard J. Freeman

TL Tokyo Electron Limited: 1 patents #101 of 380Top 30%
📍 Wenham, MA: #4 of 6 inventorsTop 70%
🗺 Massachusetts: #1,861 of 6,881 inventorsTop 30%
Overall (2003): #135,118 of 273,478Top 50%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6558506 Etching system and etching chamber Jay Wallace, Yoichi Kurono, Arthur Laflamme, Louise S. Barriss, Tadashi Onishi 2003-05-06