Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6551448 | Heat processing apparatus of substrate | Yasuhiro Kuga, Kouichirou Tanaka | 2003-04-22 |
| 6534750 | Heat treatment unit and heat treatment method | Tetsuya Oda | 2003-03-18 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6551448 | Heat processing apparatus of substrate | Yasuhiro Kuga, Kouichirou Tanaka | 2003-04-22 |
| 6534750 | Heat treatment unit and heat treatment method | Tetsuya Oda | 2003-03-18 |