MD

Masatoshi Deguchi

TL Tokyo Electron Limited: 1 patents #101 of 380Top 30%
Overall (2003): #168,141 of 273,478Top 65%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6659661 Substrate processing apparatus Eiichi Sekimoto 2003-12-09