Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593045 | Substrate processing apparatus and method | Norikatsu Sato, Yoshio Kimura, Hiroshi Tomita, Seiji Nakashima, Hidehiko Kamiya | 2003-07-15 |
| 6541170 | Resist processing method controlled through reflectivity data | Yuji Fukuda | 2003-04-01 |