KM

Kimihiro Matsuse

TL Tokyo Electron Limited: 1 patents #101 of 380Top 30%
Overall (2003): #178,192 of 273,478Top 70%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6576062 Film forming apparatus and film forming method — 2003-06-10