Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6582618 | Method of determining etch endpoint using principal components analysis of optical emission spectra | Anthony J. Toprac | 2003-06-24 |
| 6564114 | Determining endpoint in etching processes using real-time principal components analysis of optical emission spectra | Anthony J. Toprac, Joseph William Wiseman | 2003-05-13 |