Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6566279 | Method for fabricating a SiC film and a method for fabricating a SiC multi-layered film structure | Hideki Nakazawa | 2003-05-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6566279 | Method for fabricating a SiC film and a method for fabricating a SiC multi-layered film structure | Hideki Nakazawa | 2003-05-20 |