Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663784 | Method for producing three-dimensional structures by means of an etching process | Nils Kummer, Roland Mueller-Fiedler, Klaus Breitschwerdt, Andre Mueller, Frauke Driewer | 2003-12-16 |