Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642154 | Method and apparatus for fabricating structures using chemically selective endpoint detection | Jeffrey Peterson | 2003-11-04 |
| 6559058 | Method of fabricating three-dimensional components using endpoint detection | Jeffrey Peterson | 2003-05-06 |
| 6545299 | Structures using chemo-mechanical polishing and chemically-selective endpoint detection | Jeffrey Peterson | 2003-04-08 |