Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627842 | Micro-protrusion arrays fabricated by e-beam exposure | A. Kaan Kalkan | 2003-09-30 |
| 6531193 | Low temperature, high quality silicon dioxide thin films deposited using tetramethylsilane (TMS) for stress control and coverage applications | Xin Lin, Douglas M. Reber | 2003-03-11 |