Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6556280 | Period reconfiguration and closed loop calibration of an interference lithography patterning system and method of operation | Mark A. Leclerc | 2003-04-29 |
| 6522433 | Interference lithography using holey fibers | Mark A. Leclerc, Daniel P. Resler | 2003-02-18 |