Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642141 | In-situ silicon nitride and silicon based oxide deposition with graded interface for damascene application | Chi-Hing Choi | 2003-11-04 |
| 6507081 | In-situ silicon nitride and silicon based oxide deposition with graded interface for damascene application | Chi-Hing Choi | 2003-01-14 |