Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6555910 | Use of small openings in large topography features to improve dielectric thickness control and a method of manufacture thereof | Robert A. Ashton, Mary Roby, Morgan J. Thoma, Daniel J. Vitkavage | 2003-04-29 |