Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6643952 | System and method for controlling a vapor dryer process | Claire Ching-Shan Jung, Daryl Ross Koehl, Donald Rigsby | 2003-11-11 |
| 6634368 | Application of ozonated DI water to scrubbers for resist strip and particle removal processes | Claire Ching-Shan Jung | 2003-10-21 |