Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6561868 | System and method for controlling a polishing machine | Sung-Jen Fang, Thomas M. Moore | 2003-05-13 |
| 6555476 | Silicon carbide as a stop layer in chemical mechanical polishing for isolation dielectric | Leif C. Olsen, Leland Swanson | 2003-04-29 |